PIline™ Miniature Translation Stages with Ultrasonic Piezo Linear Motors from Physik Instrumente

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PIline™ Miniature Translation Stages with Ultrasonic Piezo Linear Motors

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Description

PIline™ - Ultimate motion in the smallest package
PIline™ M-661, M-662 and M-663 are the smallest piezo-motor-driven translation stages currently available on the market, combining the advantages of piezo-motor drives with PI precision micro mechanics. They are available in open-loop and closed-loop configuration featuring an integrated, non-contact linear encoder. Both versions are driven by a novel, ultra-small, high-speed ultrasonic piezo-motor drive, developed and manufactured by PI and PI Ceramic. The ultrasonic piezo motor operating principle is based on the simultaneous longitudinal and transversal oscillation of a special piezoelectric ceramic plate, creating an elliptical motion at the ceramic tip. Each cycle produces a minute step, as small as a few nanometers, allowing continuous smooth motion with virtually unlimited travel when installed in an appropriate-length translation (or rotation) stage.

The lightweight, low-profile drive combines extremely high acceleration (up to 20 g) and velocity up to 800 mm/s with excellent position resolution and high holding forces. Since the ceramic tip of the motor is preloaded against the moving part of the stage, it creates a braking force while at rest. The benefits are the elimination of servo dither and heat dissipation in steady-state mode (note that there will not be a position shift in holding mode, as is common with mechanical motor brakes). There are no gears, leadscrews or other mechanical components to contribute play or backlash.

Closed-Loop Operation with Direct-Motion Metrology-M-663These translation stages are equipped with integrated high-precision optical linear encoders (direct motion metrology) for closed-loop operation with standard servo-motor controllers, such as the PI C-843 card, C-862 Mercury stand-alone unit, or other off-the-shelf DC-motor servo-controllers. Combining the advantages of both the linear drive and non-contact linear encoder, M-663.4PM and M-663.4PR stages provide high-speed and high-precision positioning at the same time.

PIline™ M-663.4PM with 0.1 µm Linear Encoder: Small, High-Resolution, Fast Step & Settle.
The M-663.4PM is equipped with a 0.1 µm linear encoder. For optimum closed-loop performance, we recommend it be operated with a motion controller that allows setting of the full range of parameters tailored to piezo motor operation, such as the PI C-843, the GALIL DMC-1810, DMC-2020 or the NI 7344*. With such a controller, the M-663.4PM achieves a repeatability of 0.3 µm and step-and-settle times of less than 1 millisecond for 1 µm steps.PIline™ M-663.4PR with 1 µm Linear Encoder: Small, Fast, Cost Effective
The M-663.4PR comes with a 1 µm resolution linear encoder and is ideally suited for operation with the compact, stand-alone C-862.00 Mercury controller (and other servo-controllers as well). It achieves closed-loop velocities of up to 330 mm/s, an astonishing speed for such a small, closed-loop translation stage.

  • Smallest Linear Motor-Driven Translation Stages on the Market
  • Velocity to 800 mm/s
  • Acceleration to 20 g
  • Resolution to 0.1 µm
  • Open-Loop and Closed-Loop Models
  • Direct-Motion Metrology Linear Encoders Available
  • 20 mm Travel
  • AutoLock Feature Eliminates Servo Dither
  • XY Combinations Available
  • 20,000 h MTBF