Piezo Stages

The novel, high-stiffness direct drive system leads to a resonant frequency of more than 2 kHz, (4 x more than similar systems) enabling millisecond scanning rates and >500 Hz scanning frequency with sub-nanometer resolution.

Low-Profile and Clear Aperture-Ideal for Microscopy
Only 20mm high, the P-733.2DD provides one of the lowest profiles available for parallel-metrology NanoPositioning systems. The 50 x 50 mm clear aperture is ideal for transmitted-light applications such as near-field scanning microscopy, confocal microscopy and mask alignment. P-733 stages are designed for applications with loads up to 2 kg.

Higher Precision through Parallel Kinematics/Metrology
P-733 piezo scanning stages feature a parallel-kinematics design with direct-measuring, multi-axis non-contact capacitve position sensors (parallel metrology). The capacitive sensors measure the position of the moving platform (rather than strain in the actuator, as common with lower-precision strain gauge sensors). Parallel metrology can "see" all controlled degrees of freedom simultaneously and compensate for runout and crosstalk of orthogonal axes (active trajectory control).

A major advantage of the single-module, parallel-kinematics design is the identical dynamic performance of the X and Y axes, important for high scanning rates. In addition, there are no moving cables and no cable management issues to be resolved when integrating the unit. This design increases reliability, enhances responsiveness and also increases repeatability and accuracy at the nanometer level, because the force and friction exerted by a moving cable are eliminated.

• 4 x Faster, Through Direct Drive
• To 2.2 kHz Resonant Frequency in X and Y
• 100 Picometers Resolution
• Parallel-Metrology with Capacitive Sensors for Highest Multi-Axis Precision
• Parallel-Kinematics Design for Enhanced Responsiveness
• Active Runout Compensation
• 30 x 30 or 30 x 30 x 10 µm Travel Range
• 50 x 50 mm Clear Aperture

Choice of Drives: Long Range or High-Speed Direct Drive

A variety of models are offered to suit a large range of applications: lever-amplified XY systems with 100 and 200 µm travel and direct-driven XY scanners with 45 µm travel. Their high resonant frequencies of 1.5 kHz in both axes allow for faster step response and higher scanning rates, needed for example in single-molecule microscopy, or in other time-critical applications. Z stages and Z-tip/tilt stages are also available.

Higher Precision Through Parallel Kinematics/- Metrology with Capacitive Feedback Sensors

P-541/P-542 XY piezo scanning stages feature a single-module, parallel-kinematics design with all actuators operating on one central platform and no moving cables to cause microfriction. Advantages over serial kinematics setups are a lower profile, reduced inertia and better, axis-independent dynamics.

Capacitive sensors measure the actual distance between the fixed frame and the moving part of the stage directly and include any flex or other errors in the drive train—from the actuator through the lever and flexures to the platform—in the measurement. This results in higher motion linearity, long-term stability, phase fidelity, and—because external disturbances are seen by the sensor immediately—a stiffer, faster-responding servo-loop. See p. see link ff. and p. see link ff. for more information.

With parallel direct metrology, all capacitive sensors measure the position of the same moving platform against the same stationary reference (the fixed frame). This means that all motion is inside the servo-loop, no matter which actuator may have caused it, resulting in superior multi-axis precision. Advantages include: higher resolution in non-diffraction-limited imaging techniques (NSOM, etc.) and reduced blurring of edges in high-speed microscopy applications.

Superior Accuracy Through Direct-Motion-Metrology Capacitive Feedback Sensors
Applications such as optical path control in interferometry, or sample positioning in microscopy require long travel ranges with nanometer positioning accuracy. PIHera® offers Z-travel ranges to 250 µm (500 µm X and XY versions are also available). The closed-loop versions are equipped with non contact, zero friction, direct-measuring two-plate capacitve position sensors. Unlike conventional indirect sensors (such as strain gauge / piezo resistive sensors), they measure the position directly rather than the strain in the actuator / guiding system.

Capacitive sensors are absolute-measuring high-bandwidth devices and show none of the periodic errors found in incremental encoders. This permits motion linearity of better than 0.01% and effective resolution in the sub-nanometer range. This technique, combined with the inherent precision of the PI two-plate capacitive sensor and the temperature-compensated design, results in higher linearity scans, and provides superior responsiveness, resolution, repeatability and stability.

• Z-Travel to 250 µm
• Ultra-Compact Design
• Resolution < 1 nm
• Low Cost
• New Longlife Piezo Drive
• Capacitive Feedback (Closed-Loop)
• 0.01 % Position Accuracy
• X, XY, Z, XYZ Versions
• Vacuum-Compatible Versions

Higher Precision through Parallel Kinematics/ Metrology
P-560 PIMars piezo scanning stages are equipped with direct-measuring, multi-axis capacitve position sensors (parallel metrology). The capacitive sensors measure the position of the moving platform rather than strain in the actuator (as is common with lower-precision strain gauge sensors). Parallel metrology can "see" all controlled degrees of freedom simultaneously and compensate for runout and crosstalk of orthogonal axes. A major advantage of the single-module parallel-kinematics design is that there are no moving cables and no cable management issues to be resolved when integrating the unit. This design increases reliability, enhances responsiveness and also increases repeatability and accuracy at the nanometer level, because the friction and force exerted by a moving cable are eliminated (see the "Tutorial" section, see link ff. for further details).

PIMars-Up to 6 Degrees of Freedom
The new PIMars family of nanopositioning stages offers up to 6 degrees of freedom in the footprint 150 x 150 mm² with travel ranges from 100 µm to 300 µm per axis (and rotation up to 6 mrad).

Direct Drive-Ultra-Fast Scanning and Positioning
With the same footprint as standard PIMars stages, the P-561.2DD and P-561.3DD Versions provide a resonant frequency of up to 1 kHz in X and Y. This enables millisecond scanning rates with sub-nanometer resolution over a range of 45 µm x 45 µm ( x 10 µm).

• Single-Module, Parallel-Kinematics Design
• Parallel Metrology/Capacitive Feedback for Nanometer Resolution
• Low Out-of-Plane Motion
• To 300 x 300 x 250 µm Travel Range
• 66 x 66 mm Clear Aperture
• Versions to 6-DoF
• Ultra-fast XY and XYZ Versions Available
• Ultrahigh Vacuum Versions up to 10-9 hPa Available
• Invar, Super-Invar and Titanium Versions Available

Ultra-Precise Trajectory Control
The P-734 features an ultra-precise flexure guiding system, confining motion to the XY plane and reducing runout in Z to a few nanometers or less. This unsurpassed trajectory precision is fundamental for precise surface inspection and scanning microscopy measurements.

Higher Precision through Parallel Kinematics/ Metrology
P-734 piezo scanning stages are equipped with direct-measuring, multi-axis capacitve position sensors (parallel metrology). The capacitive sensors measure the position of the moving platform rather than strain in the actuator (as is common with lower-precision strain gauge sensors). Parallel metrology can "see" all controlled degrees of freedom simultaneously and compensate for runout and crosstalk of orthogonal axes. A major advantage of the single-module parallel-kinematics design is that there are no moving cables and no cable management issues to be resolved when integrating the unit. This design increases reliability, enhances responsiveness and also increases repeatability and accuracy at the nanometer level, because the friction and force exerted by a moving cable are eliminated.

• Single-Module, Parallel-Kinematics Design Features Enhanced Responsiveness and Automatic Runout Compensation
• Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy
• Flatness in the Low Nanometer Range
• 100 x 100 µm Travel Range
• Integrated Capacitive Sensors for Resolution < 1 nm
• 56 x 56 mm Clear Aperture