Superior Accuracy Through Direct Motion Metrology / Capacitive FeedbackP-721.CLQ and .CDQ are equipped with direct-measuring capacitve position sensors. Unlike conventional systems, they measure the position rather than strain in the actuator / guiding system. This technique, combined with the inherent precision of the non-contact capacitive sensor and the temperature compensated design, results in higher linearity scans, and provides superior responsiveness, resolution, repeatability and stability at the nanometer level.
Model P-721.LLQ is a lower cost version, equipped with a direct measuring LVDT sensor providing 10 nm resolution.
A variety of analog and digital controllers (OEM, bench-top and rackmount) are available to drive the units. Model P-721.CDQ can be operated with the new E-665 servo-controller through an anlalog or RS-232 interface or the E-750 high-speed digital NanoAutomation® controller. This controller also features a number of options such as high-throughput PIO (parallel I/O port) or fiber link interfaces and InputShaping™ signal processing for the fastest possible settling.
P-725 PIFOCs® are screwed between the turret and the objective, extending the optical path by only 12.5 mm (infinity-corrected microscope required; extension tubes are available to adjust path lengths of other objectives on the turret).
Superior Accuracy Through Direct-Motion-Metrology Capacitive Feedback Sensors P-725s are equipped with direct-measuring capacitve position sensors. Unlike conventional indirect systems, they measure the position rather than strain in the actuator / guiding system. Capacitive sensors are absolute-measuring devices and show none of the periodic errors found in incremental linear encoders. This permits motion linearity of better than 0.03% and resolution in the sub-nanometer range. This technique, combined with the inherent precision of the non-contact, two-plate capacitive sensor and the temperature-compensated design, results in higher linearity scans, and provides superior responsiveness, resolution, repeatability and stability at the nanometer level.
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